2105040 – System Integration in Micro- and Nanotechnology II
This lecture is given in English. It is the second part after the summer term lecture "System Integration in Micro- and Nanotechnology I".
But both parts can be attended independent of each other.
Lecture outline:
- Introduction to system integration
- Integration technologies
* 2.5/3D integration in semiconductor and microsystem technology
* Packaging
* Direct laser writing (two-photon lithography)
* Microassembly
* Self-assembly
- Applications
* Lab-on-chip systems
* Photonics
* Micro-optics
* Fibre optics
* Silicon photonics