2105040 – System Integration in Micro- and Nanotechnology II

This lecture is given in English. It is the second part after the summer term lecture "System Integration in Micro- and Nanotechnology I". But both parts can be attended independently of each other. Note: Attendance is limited to 25 persons. Lecture outline: - Introduction to system integration - Integration technologies * 2.5/3D integration in semiconductor and microsystem technology * Packaging * Direct laser writing (two-photon lithography) * Microassembly * Self-assembly - Applications * Lab-on-chip systems * Photonics * Micro-optics * Fibre optics * Silicon photonics