In this lecture, CMOS technology is presented with the latest technological innovations (“high k materials”, “gate-last processes”, stress engineering, FinFETs, nanosheets, etc.). A detailed understanding of the interaction of the new materials, the device architectures and the functionality of the basic components should be conveyed. In addition to physical and circuitry properties (variation modeling, self-heating, noise, performance), so-called layout effects are also dealt with, which play a special role in "Advanced CMOS". A particular focus is the mapping of the technologies in design systems (Electronic Design Automation) as well as SPICE simulations according to BSIM (Berkeley Simulation Transistor Models) and PSP (Advanced Surface-Potential-Based MOSFET Model) standard and the use of industrial software (PDKs) for the electrical simulation and circuit design. In addition, highly integrated low power systems and their special requirements in terms of power consumption, wiring concepts and variation modeling are explained.
Also the lab course (
2308442 – Übung Moderne VLSI Technologien will show you how to design PLLs and standard cells, simulate schematics and draw physical layouts.
Previous knowledge from the lectures "Optics and Solid State Electronics", "Components" and "Electronic Circuits" is recommended
